罗茨真空泵工作原理
罗茨泵是一种无内压缩的真空泵,通常压缩比很低,故高、中真空泵需要前级泵。
Roots pump is a kind of vacuum pump without internal compression, usually the compression ratio is very low, so the high and medium vacuum pump needs the front stage pump.
靠泵腔内一对叶形转子同步、反向旋转的推压作用来移动气体而实现抽气的真空泵。
It is a vacuum pump that moves the gas by pushing a pair of blade shaped rotors in the pump cavity synchronously and reversely.
罗茨真空泵是指具有一对同步高速旋转的鞋底形转子的机械真空泵,此泵不可以单独抽气,前级需配油封、水环等可直排大气。
Roots vacuum pump is a kind of mechanical vacuum pump with a pair of synchronous and high-speed rotating sole rotors. The pump can not be pumped separately, and the front stage needs oil seal and water ring to discharge air directly.
它的结构和工作原理与罗茨鼓风机相似,工作时其吸气口与被抽真空容器或真空系统主抽泵相接。这种真空泵的转子与转子之间、转子与泵壳之间互不接触,间隙一般为0.1~0.8毫米;不需要用油润滑。转子型线有圆弧线、渐开线和摆线等。渐开线转子泵的容积利用率高,加工精度易于保证,故转子型线多用渐开线型。罗茨真空泵的转速可高达3450~4100转/分;抽气速率为30~10000升/秒(1升=10-3米3);极限真空:单级为6.5×102帕,双级为1×103帕。
Its structure and working principle are similar to roots blower. When it works, its suction port is connected with the vacuum container or main pump of vacuum system. There is no contact between the rotor and the rotor, or between the rotor and the pump shell of the vacuum pump, and the clearance is generally 0.1-0.8 mm; oil lubrication is not required. The rotor profile includes arc, involute and cycloid. Involute rotor pump has high volume utilization rate and easy to ensure machining accuracy, so involute type is used for rotor profile. The rotary speed of Roots vacuum pump can be as high as 3450 ~ 4100 rpm; the pumping rate is 30 ~ 10000 L / S (1 L = 10-3 m3); the limit vacuum is 6.5 × 102 PA for single stage and 1 × 103 PA for double stage.
罗茨泵的极限真空除取决于泵本身结构和制造精度外,还取决于前级泵的极限真空。为了提高泵的极限真空度,可将罗茨泵串联使用。罗茨泵的工作原理与罗茨鼓风机相似。由于转子的不断旋转,被抽气体从进气口吸入到转子与泵壳之间的空间v0内,再经排气口排出。由于吸气后v0空间是全封闭状态,所以,在泵腔内气体没有压缩和膨胀。 但当转子顶部转过排气口边缘,v0空间与排气侧相通时,由于排气侧气体压强较高,则有一部分气体返冲到空间v0中去,使气体压强突然增高。当转子继续转动时,气体排出泵外。罗茨泵在泵腔内,有二个“8”字形的转子相互垂直地安装在一对平行轴上,由传动比为1的一对齿轮带动作彼此反向的同步旋转运动。在转子之间,转子与泵壳内壁之间,保持有一定的间隙,可以实现高转速运行。
The limit vacuum of roots pump depends not only on the structure and manufacturing accuracy of the pump itself, but also on the limit vacuum of the previous stage pump. In order to improve the limit vacuum degree of the pump, roots pump can be used in series. The working principle of roots pump is similar to roots blower. Due to the continuous rotation of the rotor, the extracted gas is drawn into the space V0 between the rotor and the pump shell from the air inlet, and then discharged through the exhaust port. Because the V0 space is completely closed after suction, there is no compression and expansion in the pump chamber. However, when the top of the rotor turns around the edge of the exhaust port and the V0 space is connected with the exhaust side, a part of the gas will recoil into the space V0 due to the high gas pressure on the exhaust side, which makes the gas pressure suddenly increase. When the rotor continues to rotate, the gas is discharged from the pump. In the pump cavity of roots pump, there are two "8" shaped rotors installed vertically on a pair of parallel shafts, and a pair of gear belts with transmission ratio of 1 act in the opposite synchronous rotation motion. There is a certain gap between the rotors and the inner wall of the pump shell, which can realize high speed operation.